Daniel J. C. Herr

All books by Daniel J. C. Herr

(Displaying 7 Books)

Alternative lithographic technologies II

Daniel J. C. Herr

Alternative lithographic technologies III

Daniel J. C. Herr

Directed Self-Assembly for Nanopatterning

Daniel J. C. Herr

Metrology, inspection, and process control for microlithography XVI

Daniel J. C. Herr

Metrology, inspection, and process control for microlithography XVII

Daniel J. C. Herr

Nanoelectronics

Daniel J. C. Herr

Nanoscience and Nanoengineering

Ajit D. Kelkar